Successful Improvement Case Study 4: Modification of Organic EL Film Deposition Equipment
Successful Improvement Case Study Case 4: Modification of Organic EL Film Formation Equipment
◆◇◆Background◆◇◆ Until now, we have been using organic EL deposition equipment from another company. However, there have been the following issues and requests regarding its use. ◆ Since there is no mask exchange mechanism, it is necessary to open the atmosphere each time the mask is changed, which can cause damage to the samples. Additionally, the lack of a consistent vacuum environment leads to wasted time. ◆ In the organic deposition chamber, there are currently up to six deposition cells, but we would like to utilize the existing vacuum chamber to increase expandability and conduct various experiments.
- Company：北野精機
- Price：Other
